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鍎€鍣ㄦ噳(y墨ng)鐢ㄦ枃绔�

Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering

渚嗘簮:  鑿尟鍎€鍣�   浣滆€�:  绠＄悊鍝�   鏅傞枔:  2021-09-08  榛炴搳:   1316 娆�


Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering.pdf


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